Browsing by Author Liu, Pengqiang
Showing results 1 to 5 of 5
Issue Date | Title | Author(s) |
2015 | N+/P Shallow Junction with High Dopant Activation and Low Contact Resistivity Fabricated by Solid Phase Epitaxy Method for Ge Technology | Liu, Pengqiang; Li, Ming; An, Xia; Lin, Meng; Zhao, Yang; Zhang, Bingxin; Xia, Xuyuan; Huang, Ru |
2015 | N+/P shallow junction with high dopant activation and low contact resistivity fabricated by solid phase epitaxy method for Ge technology | Liu, Pengqiang; Li, Ming; An, Xia; Lin, Meng; Zhao, Yang; Zhang, Bingxin; Xia, Xuyuan; Huang, Ru |
2013 | Surface passivation of the Ge substrate by novel nitrogen plasma immersion treatment | Lin, Meng; Li, Ming; An, Xia; Yun, Quanxin; Li, Min; Li, Zhiqiang; Liu, Pengqiang; Zhang, Xing; Huang, Ru |
2014 | Surface pretreatment and passivation utilizing high concetrated HCL and NH4F solution for germanium-based technology | Xia, Yuxuan; Zhang, Bingxin; Li, Min; Lin, Meng; Liu, Pengqiang; Zhao, Yang; Li, Ming; An, Xia; Zhang, Xing; Huang, Ru |
2016 | Thermal Stability Improvement of Nickel Germanide Utilizing Nitrogen Plasma Pretreatment for Germanium-Based Technology | Zhang, Bingxin; An, Xia; Liu, Pengqiang; Li, Ming; Lin, Meng; Hao, Peilin; Zhang, Xing; Huang, Ru |