Showing results 1 to 20 of 120
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| Issue Date | Title | Author(s) |
| 2021 | A 0.084% Nonlinearity Open-Loop Capacitive Micro-accelerometer With On-Chip Digital Nonlinearity Calibration and Embedded EEPROM | Zhao, Meng; Zhao, Qiancheng; Chen, Zhongjian; Lu, Wengao; Zhang, Yacong; Yan, Guizhen |
| 2013 | 1 x 8 MEMS FLEXIBLE INTEGRATED OPTICAL DEVICE FOR OPTICAL FIBER-BASED NETWORKING APPLICATIONS | Chen, Qinghua; Chen, Yingjun; Wu, Wengang; Li, Yanmei; Li, Li; Yan, Guizhen; Hao, Yilong |
| 2008 | A 16 �� 16 micro mirror array for optical switches | Chen, Qinghua; Wu, Wengang; Wang, Ziqian; Yan, Guizhen; Hao, Yilong |
| 2005 | A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors | Yang, Zhenchuan; Wang, Congshun; Yan, Guizhen; Hao, Yilong; Wu, Guoying |
| 2008 | A bulk micromachined z-axis single crystal silicon gyroscope for commercial applications | Ding, Haitao; Liu, Xuesong; Cui, Jian; Chi, Xiaozhu; Guo, Zhongyang; Yang, Zhenchuan; Yan, Guizhen |
| 2012 | A capacitive readout circuit with DC sensing method for micromachined gyroscopes | Zhou, Kailong; Sun, Lina; Ge, Fei; Yang, Zhenchuan; Yan, Guizhen |
| 2011 | Characterization of AlGaN/GaN Cantilevers Fabricated with Deep-Release Techniques | Lv, Jianan; Yang, Zhenchuan; Yan, Guizhen; Cai, Yong; Zhang, Baoshun; Chen, Kevin J. |
| 2005 | Circuit design of a high performance CMOS continuous-time current comparator with gain boosting structures in parallel | Fan, Jie; Tang, Ju; Yan, Guizhen; Zhang, Yacong; Ji, Lijiu |
| 2006 | Circuit design of a high performance CMOS continuous-time current comparator with gain boosting structures in parallel | Fan, Jie; Tang, Ju; Yan, Guizhen; Zhang, Yacong; Ji, Lijiu |
| 2011 | A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence | Sun, Hongzhi; Jia, Kemiao; Liu, Xuesong; Yan, Guizhen; Hsu, Yu-Wen; Fox, Robert M.; Xie, Huikai |
| 2011 | A CMOS-MEMS gyroscope interface circuit design with high gain and low temperature dependence | Sun, Hongzhi; Jia, Kemiao; Liu, Xuesong; Yan, Guizhen; Hsu, Yu-Wen; Fox, Robert M.; Xie, Huikai |
| 2008 | CMOS-MEMS gyroscope using integrated diode-rings as interface circuits | Wang, Jia; Qian, Liang; Yan, Guizhen |
| 2006 | Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors | Liu, Xuesong; Yang, Zhengchuan; Yan, Guizhen; Fan, Jie; Ding, Haitao; Liu, Ye |
| 2010 | Design and fabrication of a MEMS capacitive accelerometer based on double-device-layers SOI wafer | Hu, Qifang; Gao, Chengchen; Hao, Yilong; Zhang, Dacheng; Yan, Guizhen; Zhang, Yangxi |
| 2005 | Design and fabrication of a microfluid angular rate sensor | Zhou, Jian; Yan, Guizhen; Zhu, Yong; Xiao, Zhiyong; Fan, Jie |
| 2010 | Design and fabrication of a novel silicon probe for micromachined surface profilers | Jiang, Senlin; Zhang, Dacheng; Yang, Zhengchuan; Yan, Guizhen |
| 2013 | Design and fabrication of a silicon probe for surface profilers | Jiang, Senlin; Zhang, Dacheng; Lin, Longtao; Yang, Zhenchuan; Zhao, Qiancheng; Yan, Guizhen |
| 2004 | Design and fabrication of a torsional Z-axis capacitive accelerometer with novel comb capacitor | Yang, Zhenchuan; Yan, Guizhen; Hao, Yilong; Wu, Guoying |
| 2014 | Design and simulation of a 2-axis low g acceleration switch with multi-folded beams | Lin, Luxing; Zhao, Qiancheng; Yang, Zhenchuan; Zhang, Dacheng; Yan, Guizhen |
| 2006 | Design of a silicon beam resonator for a novel gas sensor | Hao, Yilong; Xu, Jiajia; Zhang, Guobing; Wu, Guoying; Yan, Guizhen |
