Title多晶硅发射极超高速集成电路工艺
Other TitlesSuper High Speed Polysilicon Emitter Integrated Circuit Technology
Authors张利春
倪学文
王阳元
Affiliation北京大学微电子所,北京 100871
Keywords多晶硅发射极
超高速
集成电路
工艺研究
Issue Date2001
Publisher半导体学报
Citation半导体学报.2001,22,(6),811-816.
Abstract报道了具有先进双极
URIhttp://hdl.handle.net/20.500.11897/180036
ISSN0253-4177
DOI10.3321/j.issn:0253-4177.2001.06.029
Indexed中文核心期刊要目总览(PKU)
中国科学引文数据库(CSCD)
Appears in Collections:信息科学技术学院

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