Title1 x 8 MEMS FLEXIBLE INTEGRATED OPTICAL DEVICE FOR OPTICAL FIBER-BASED NETWORKING APPLICATIONS
AuthorsChen, Qinghua
Chen, Yingjun
Wu, Wengang
Li, Yanmei
Li, Li
Yan, Guizhen
Hao, Yilong
AffiliationZhaoqing Univ, Inst Elect Informat & Elect Engn, Guangzhou 526061, Guangdong, Peoples R China.
Peking Univ, Inst Microelect, Natl Key Lab Micro Nano Fabricat Technol, Beijing 100871, Peoples R China.
Keywordsflexible integration
MEMS
optical switching
variable optical attenuating
optic fiber communication
ATTENUATOR
FABRICATION
DESIGN
SWITCHES
Issue Date2013
Publishermicrowave and optical technology letters
CitationMICROWAVE AND OPTICAL TECHNOLOGY LETTERS.2013,55,(2),231-236.
AbstractA 1 x 8 MEMS (micro-electronic mechanical system)based flexible integrated optical device with optical switch and variable optical power attenuating functions has been proposed to optimally serve optical fiber-based networking applications. The device manipulates the light with binary-slope mirrors driven by compound electrostatic actuator. The optical models for switching and attenuating are investigated, respectively. Performances of the fabricated devices assembled with ball-lensed fibers are measured and discussed. Measurements reveal that the insertion loss of the device is less than 2.8 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.8 dB in the whole attenuation range. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 55:231-236, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27293
URIhttp://hdl.handle.net/20.500.11897/239799
ISSN0895-2477
DOI10.1002/mop.27293
IndexedSCI(E)
EI
Appears in Collections:信息科学技术学院

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