TitleA bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors
AuthorsYang, Zhenchuan
Wang, Congshun
Yan, Guizhen
Hao, Yilong
Wu, Guoying
AffiliationInstitute of Microelectronics, Peking University, Beijing 100871, China
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Issue Date2005
Citation13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05.Seoul, Korea, Republic of,1(121-124).
AbstractA bulk micromachined lateral axis single crystal silicon gyroscope with lateral driving comb electrodes and vertical differential sensing comb capacitors is designed, fabricated and tested. The neighboring electrodes of the newly designed sensing capacitors have different thickness at the lower side, so the capacitors can differentially sense vertical motion and have low air damping. A bulk micromachining process compatible with previous reported accelerometers and z-axis gyroscopes fabrication is demonstrated. The fabricated gyroscope is tested at atmospheric environment, and it has a sensitivity of 0.8mv/??/s, and the noise equivalent angular rate of 0.1??/s/Hz 1/2. ? 2005 IEEE.
URIhttp://hdl.handle.net/20.500.11897/295264
ISSN9780780389946
DOI10.1016/j.compag.2004.11.018
IndexedEI
Appears in Collections:信息科学技术学院

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