TitleFabrication and cutting performance of CrAlN/CrAl multilayer coatings deposited by continuous high-power magnetron sputtering
AuthorsLiu, Liangliang
Ruan, Qingdong
Wu, Zhongzhen
Li, Dan
Huang, Chao
Wu, Yuzheng
Li, Tijun
Wu, Zhongcan
Tian, Xiubo
Fu, Ricky K. Y.
Chu, Paul K.
AffiliationCity Univ Hong Kong, Dept Phys, Dept Mat Sci & Engn, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China
City Univ Hong Kong, Dept Biomed Engn, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China
Peking Univ, Sch Adv Mat, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
KeywordsRESIDUAL-STRESS
MICROSTRUCTURE
Issue Date15-May-2022
PublisherCERAMICS INTERNATIONAL
AbstractContinuous high-power magnetron sputtering (C-HPMS) is one of the desirable techniques to fabricate coatings with high hardness and a smooth surface to meet the demand by micro-millings for processing/cutting of printed circuit boards (PCBs). However, catastrophic failure can occur on the coatings because of the high residual stress in contact with hard glass fibers in PCBs at a high cutting speed. In this work, CrAlN/CrAl multilayer coatings consisting of thin CrAl interlayers are fabricated and characterized. The thin CrAl layers reduce the residual stress significantly from-6.7 GPa to-1.5 GPa, while the hardness of 35 GPa is preserved. Furthermore, the adhesion strength and wear resistance are improved appreciably by addition of the interlayers. The PCB cutting tests reveal that the CrAl layers mitigate sudden failure of the coatings and improve the cutting stability and service life by near two times.
URIhttp://hdl.handle.net/20.500.11897/643171
ISSN0272-8842
DOI10.1016/j.ceramint.2022.01.346
IndexedSCI(E)
Appears in Collections:新材料学院

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