| Title | Enhanced mechanical properties of CrN coatings by plasma immersion ion implantation and deposition |
| Authors | Liu, Liangliang Li, Tijun Ruan, Qingdong Li, Dan Huang, Chao Zhang, Xiaolin Ma, Yinghe Wu, Yuzheng Wu, Zhongcan Fu, Ricky K. Y. Wu, Zhongzhen Chu, Paul K. |
| Affiliation | City Univ Hong Kong, Dept Phys, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China City Univ Hong Kong, Dept Mat Sci & Engn, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China City Univ Hong Kong, Dept Biomed Engn, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China Peking Univ, Sch Adv Mat, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China |
| Keywords | BOUNDARIES NITROGEN HARDNESS STRESS ENERGY ALLOY FILMS |
| Issue Date | 15-Feb-2023 |
| Publisher | CERAMICS INTERNATIONAL |
| Abstract | Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 x 1014/m2 to 1.3 x 1017/m2. In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised. |
| URI | http://hdl.handle.net/20.500.11897/670300 |
| ISSN | 0272-8842 |
| DOI | 10.1016/j.ceramint.2022.10.215 |
| Indexed | EI SCI(E) |
| Appears in Collections: | 新材料学院 |
